Air bearing stages

Air bearing stages

  • E-ABT-XY-360X360 (Ceramic linear motor stage) XY Air bearing Linear Motor Stage

    E-ABT-XY-360X360 (Ceramic linear motor stage) XY Air bearing Linear Motor Stage

    The ceramic version uses high-purity alumina as the air-floating structure and guide elements. Compared with granite and metal, alumina ceramics have a smaller expansion coefficient, and the advantages of Straightness, hardness, and wear resistance.

  • E-EC-ABL-X One-dimensional air floating Precision Linear Stages

    E-EC-ABL-X One-dimensional air floating Precision Linear Stages

    The E-EC-ABL-X series linear motor platform adopts the method of air bearing guide rail combined with iron core linear motor, which has straightness and flatness unmatched by traditional mechanical guide rails, and is especially suitable for small step distances or ultra-precise positioning application scenarios. It is an excellent application choice for precision optical debugging, installation and processing.

    ● Air bearing linear guide has very good flatness and straightness

    ● Iron core linear motor ensures sufficient system rigidity and dynamic performance

    ● Quiet and stable operation with extremely low noise

    ● It have a very high level of precision performance

    ● Ideal for scanning applications or high-precision positioning

    ● Cleanroom compatible

    ● Size of the motion platform 210 mm × 100 mm

    ● Travel ranges 200 mm to 500 mm

    ● Resolution to 100nm or 1 nm

  • E-ART160 Air bearing rotary stage Rotation Stage with Air Bearings

    E-ART160 Air bearing rotary stage Rotation Stage with Air Bearings

    ● Cleanroom compatible

    ● Motion platform diameter 180mm to 300 mm

    ● Load capacity to 650N

    ● Eccentricity and flatness < 100 nm

    ● Can be mounted vertically or horizontally direct-drive, rotary air-bearing stages

    ● Analog and digital position feedback