Products
E-DLS -200 Linear motor delay stage
| SPECIFICATION | DLS-X200 | DLS-X300 |
| Motor type | Three-phase linear motor | |
| Raster resolution | Default 50nm absolute value | |
| Motor thrust | Rated thrust 8.9N Peak thrust 44N | |
| minimum step size | 100nm | |
| journey | 200 | 300 |
| Repeatability | ±150nm | |
| positioning accuracy | ±500nm（Interferometer calibration） | |
| Flatness | ≤±2.5um | ≤±3.5um |
| Straightness | 1.5um | 2um |
| Maximum speed | 300mm/s | |
| maximum acceleration | 1000mm/s2 | |
| maximum load | 2kg | |
| （pitch） | ±20sec（±100urad） | ±30sec（±150urad） |
| （yaw） | ±18sec（±90urad） | ±24sec（±120urad） |
| Origin Repeatability | 100nm | |
Write your message here and send it to us
