E-LMT-XYZ (high precision Integrated combination XYZ Axis stage)

Elevation Stage with Excellent Straightness and Flatness of Motion

The vertical stage platform design provides excellent straightness and flatness, with better pitch and yaw

performance compared to vertically mounted linear positioning stages, where the cantilevered load can cause

deflections in the supporting linear bearings.

High Resolution Linear Motion with voice Servo MotorsE-ABVT-Z is internally driven by a voice coil motor, equipped

with an air-floating transfer rail (cross ball guide rails can also be used), and uses a high-resolution grating to close

the loop, and is equipped with a high-performance driver to ensure the minimum displacement and repeatability of

the positioning stage. achieve great performance.

Computer Control, Software, Programming

Product Detail

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Specification	LMT-XY-200X200	NFZ10
Motor type	Three-phase ironless motor	Voice coil motor
Resolution	Default 100nm digital (optional 1vpp analog or other resolution)
Motor thrust	Continuous 60N/peak 210N	Continuous 30N/peak 90N
Minimum step size[nm]	200nm	200nm
Travel [mm]	200×200	10
Repeatability [um]	±0.3
Position Accuracy [um]	±1	±0.5
Flatness [um]	10um	8um
Straightness [um]	1um	1.5um
Max speed [mm/s]	500mm/s	50mm/s
Load Capacity [kg]	5kg(Z axis with pneumatic constant force balance weight)