E-LMTE390-XY-330X330 Large  travel hollow linear motor stage

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E-LMTE390-XY-330X330 Large travel hollow linear motor stage

Short Description:

It is used in large hollow microscopes and is widely used in semiconductor inspection.


Product Detail

Specification

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  • Specifcation X-axis Y-axis
    Motor type Dual linear motor drive
    Raster resolution sincos 4.88nm(Optional absolute value or higher resolution)
    Motor thrust Continuous 60N/Peak 210N Continuous 120N/Peak 420N
    Minimum step size [nm] 50nm(Paired with nanopwm or linear driver)
    Travel [mm] 330 330
    Repeatability ±0.25
     Positioning accuracy [um] ±1(Interferometer calibration)
    Flatness [um] ≤±2.5um
    Straightness [um] ≤±1.5um ≤±2um
    Maximum speed [mm/s] 1000
    Maximum acceleration [g] no load 1.5g(X alex)1g(Y alex)
    Maximum load [kg] 30

     

     

     

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