E-MST-XY-110X110  Industrial measurement microscope scanning stage

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E-MST-XY-110X110 Industrial measurement microscope scanning stage

Short Description:

industrial microscope linear motor platform is a product specially designed and developed for mainstream research-level inverted microscopes.
It has the advantages of better precision, faster response, higher speed and longer life. Moreover, since the linear motor is a non-contact direct drive mechanism, it is almost noiseless, and is a traditional display motor.
An optimized and upgraded product of the micromirror platform.

 


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Specification

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  • Specification E-MST-XY-110X110
    Motor type and drive mode 2-phase stepping motor + precision ball screw
    Screw lead 2mm
    Travel 110mm x 110mm
    Repeatability ≤±1.5um
    positioning accuracy ≤±5um(can be compensated to±2um)
    minimum step size 0.1um
    Flatness [um] ≤±4
    Straightness [um] ≤±2
    Orthogonality [arcsec] ≤±3
    Maximum speed [mm/s] ≥30
    Maximum load [kg] ≥10
    Structural material and surface treatment Aluminum alloy hard anodizing

     

     

     

     

     

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