HEX-S6.50.200 6-Axis Hexapod Tri-pod structer Parallel  six degrees of freedom stages

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HEX-S6.50.200 6-Axis Hexapod Tri-pod structer Parallel six degrees of freedom stages

Short Description:

Features:
High precision, can be assembled, can be customized, light aperture 460mm

Delivers consistent and reliable motion accuracy in a compact and rugged stage
It has ultra-fine positioning resolution and sufficient payload capability
Ideal for applications requiring complex multi-degree of freedom motion when available space is limited. It is suitable for the leveling of semiconductor test wafer.
Application scenario of optical inspection, large hollow aperture adjustment optical path.

 

 


Product Detail

SPECIFICATION

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    Specification XY axis θXθY axis Z axis θZ axis
    Travel ±100mm ±3deg ±25mm 360deg
    Motor type stepper motor stepper motor stepper motor direct drive motor
    Grating resolution 4.88nm(1vpp) 4.88nm(1vpp) 4.88nm(1vpp) 0.04sec
    Minimum step size 50nm 0.01ec 50nm 0.001sec
    Repeatability  Accuracy [um] ±0.5um ±0.5sec ±0.3um ±0.1sec
      Accuracy [um] ±1um ±2sec ±1um ±3sec
    Maximum speed 100mm/s 30deg/sec 15mm/s 4rps
    Max load capacity [kg] Horizontal load 300kg, vertical use load please contact the manufacturer
    Weight 750kg

     

     

     

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